This produces silicic acid and hydrogen chloride.

Trichlorosilane is a compound containing silicon, hydrogen and chlorine elements. It is soluble in most organic solvents such as benzene and ether. The relative density is 1.37, and the relative density is 4.7. It is stable in nature. Strongly irritating to eyes and mucous membrane of respiratory tract. At high concentrations, it can cause corneal opacity, respiratory inflammation, and even pulmonary edema. Reacts with oxidants and creates a fire hazard. It is highly volatile, fumes in the air, and can produce hot and toxic corrosive fumes when it encounters water or steam. When a leak occurs, the personnel in the leaked contaminated area should be quickly evacuated to a safe area, and isolated, strictly restricted in and out, and cut off the fire source. Emergency personnel wear self-contained positive pressure breathing apparatus and fire protection clothing, and enter the scene from upwind. Cut off the source of leakage to prevent entering restricted spaces such as sewers and flood drains.